| 1 | P.J. Shih, C.L. Dai, K.W. Chou, “A method to measure natural frequency of a spherical specimen in liquid environment by appliy atomic force microscope,” 2016 International congress on Engineering and Information, Osaka, Japan, May 10-12, 2016. |
| 2 | W.C. Shen, C.L. Dai, Y.C. Tsai, “Low concentration ammonia gas microsensor,” Symposium on Nano Device Technology, Hsinchu, Taiwan, May 12-13, 2016. |
| 3 | C.H. Fang, C.L. Dai, Y.C. Tsai, “Ultraviolet-selective photodiode,” Symposium on Nano Device Technology, Hsinchu, Taiwan, May 12-13, 2016. |
| 4 | B.H. Chen, C.L. Dai, Y.C. Tsai, “A piezoelectric energy harvester using human motion,” Symposium on Nano Device Technology, Hsinchu, Taiwan, May 12-13, 2016. |
| 5 | W. Chen, C.L. Dai, Y.C. Tsai, “Three dimensional magnetic micro field sensor with low power dissipation,” Symposium on Nano Device Technology, Hsinchu, Taiwan, May 12-13, 2016. |
| 6 | C.C.Hsu., C.T. Meng., C.C. Cheng, C.C. Wu, C.L. Dai, “Fabrication of high transmittance SiO2 nanotexture with optimal spin-coating method,” 27th International Microprocesses and Nanotechnology Conference, Toyama, Japan, November 10-13, 2015. |
| 7 | 林彥男, 戴慶良, “磁電晶體式三維磁場感測器,” 第十九屆奈米工程暨微系統技術研討會,台北, August 13-14, 2015. |
| 8 | 方智弘, 戴慶良, “紫外光微感測器,” 第三十二屆全國學術研討會, 高雄, December 11-12, 2015. |
| 9 | 陳柏豪, 戴慶良, “手腕穿戴式壓電集能器,” 第三十二屆全國學術研討會, 高雄, December 11-12, 2015. |
| 10 | 沈暐鈞, 戴慶良, “檢測低濃度氨氣之微型氣體感測器,” 第三十九屆全國力學會議, 台北, November 20-21, 2015. |
| 11 | 陳煒仁, 戴慶良, “結合MAGFET之磁電晶體三維磁場感測器,” 第三十九屆全國力學會議, 台, November 20-21, 2015. |
| 12 | M.Z. Yang, C.L. Dai, “A capacitive ammonia sensor using the commercial 0.18 μm CMOS process”, 2014 International Conference on Future Materials Engineering and Industry Application, Hong Kong, December 10-11, 2014. |
| 13 | P.J. Shih, P.I.T. Chang, W.P. Shih, C.L. Dai, “Frequency function of noncontact AFM liquid environment”, 2014 International Conference on Non-contact Atomic Force Microscopy, Tsukuba, Japan, August 4-8, 2014. |
| 14 | Y.R. Guo, W.P. Shih, C.L. Dai, P.J. Shih, “A mathematical model for the oscillation of the eyeball”, 2014 International Research Conference on Engineering and Technology, Bali, Indonesia, June 28-29, 2014. |
| 15 | C.C. Hsu, Y.C. Liao, P.L. Li, C.L. Dai, C.C. Wu, “Salt concentration measurement with single/multiple silicon nanowire sensor,” 2014 Micro and Nano Engineering, Lausanne, Switzerland, September 22-26, 2014. |
| 16 | C.C. Wu, J.Y. Lee, C.C. Hsu, C.L. Dai, J.Y. Jeng, “A simple evaluation of grating scale for linear optical encoder”, 2014 Micro and Nano Engineering, Lausanne, Switzerland, September 22-26, 2014. |
| 17 | J.Z. Tseng, C.L. Dai, “Design and fabrication of 3D magnetic microsensor,” 2014 Symposium on Nano Device Technology, Hsinchu, Taiwan, May 1-2, 2014. |
| 18 | W.L. Lee, C.L. Dai, “Design and fabrication of thermoelectric generator using electroplating process,” 2014 Symposium on Nano Device Technology, Hsinchu, Taiwan, May 1-2, 2014. |
| 19 | M.Z. Yang, C.L. Dai, “Fabrication of a gas sensor array integrated with ring oscillator circuit on chip using CMOS-MEMS process,” 2014 Symposium on Nano Device Technology, Hsinchu, Taiwan, May 1-2, 2014. |
| 20 | C.F. Fong, C.L. Dai, “Micro gas sensor array for detection of VOCs,” 2014 Symposium on Nano Device Technology, Hsinchu, Taiwan, May 1-2, 2014. |
| 21 | M.Z. Yang, C.Li. Dai, “Fabrication of an integrated acetone microsensor using CMOS-MEMS process”, 18th Nano Engineering and Microsystem Technology Conference, Tainan, B03-112, August 21-22, 2014. |
| 22 | J.Z. Tseng, Y.N. Lin, C.L. Dai, “3D magnetic microsensor based on NPN magneto-transistor”, 18th Nano Engineering and Microsystem Technology Conference, Tainan, PC-11, August 21-22, 2014. |
| 23 | M.Z. Yang, C.L. Dai, “An Ammonia Sensor manufactured Using the Commercial 0.18 μm CMOS Process”, 2014 CSME, Taichung, No.03240, December 6-7, 2014. |
| 24 | 林嘉哲, 戴慶良, “可撓式廢熱回收發電系統”,第三十八屆全國力學會議, 基隆, No.659, November 21-22, 2014. |
| 25 | 林彥男, 戴慶良, “整合磁電晶體式磁場感測器與紫外光感測器”,第三十八屆全國力學會議, 基隆, No.572, November 21-22, 2014. |
| 26 | 鄭文豪, 戴慶良, “應用於血糖異常偵測之微型氣體感測器之設計與模擬”,第三十八屆全國力學會議, 基隆, No.671, November 21-22, 2014. |
| 27 | 林嘉哲, 戴慶良, “可撓式熱電發電器設計及其應用”,中國機械工程學會第三十一屆全國學術研討會, 台中, No.03097, December 6-7, 2014. |
| 28 | 林彥男, 戴慶良, “整合3-D磁場感測器與紫外光感測器”,中國機械工程學會第三十一屆全國學術研討會, 台中, No.03113, December 6-7, 2014. |
| 29 | 鄭文豪, 戴慶良, “檢測低濃度丙酮之微型氣體感測器之設計與模擬”,中國機械工程學會第三十一屆全國學術研討會, 台中, No.03147, December 6-7, 2014. |
| 30 | 戴慶良, 李汪麟, 曾健治, 楊閔智, “可撓性基材的熱電式發電器之研製”, 自動化技術研討會, 雲林虎尾, November 14-15, 2014. |
| 31 | 戴慶良, 馮建富, 楊閔智, 運用CMOS-MEMS技術研製揮發性氣體感測器陣列”, 自動化技術研討會, 雲林虎尾, November 14-15, 2014. |
| 32 | 李汪麟, 林嘉哲, 戴慶良, “利用電鍍技術製作可撓式熱電發電器”, 第十八屆奈米工程暨技術研討會, 台南, B02-84, August 21-22, 2014. |
| 33 | 馮建富, 鄭文豪, 戴慶良, “檢測揮發性有機化合物之微型氣體感測陣列”,第十八屆奈米工程暨技術研討會, 台南, BD-117, August 21-22, 2014. |
| 34 | 王繼弘, 戴慶良, “應用玻璃表面蝕刻技術於抗眩光玻璃之研究”, 第六屆綠色科技工程與應用研討會, 台中, May 21, 2014. |
| 35 | 方新傑, 戴慶良, “溫度對積體電路測試良率之研究”, 第六屆綠色科技工程與應用研討會, 台中, May 21, 2014. |
| 36 | M. Z. Yang, C.L. Dai, “Fabrication of a humidity microsensor with circuit based on zinc oxide nanowire,” Int. Conf. Electrical Control Automation Engineering, Hongkong, China, pp. 372-378, December 1-2, 2013. (EI) |
| 37 | S.W. Peng, M.Z. Yang, C.L. Dai, “Manufacture of thermoelectric micr generator using the commercial CMOS process,” Int. Conf. Electrical Control Automation Engineering, Hongkong, China, pp. 302-306, December 1-2, 2013. (EI) |
| 38 | C.L. Dai, M.Z. Yang, S.W. Peng, “An energy harvesting device manufactured using the commercial 0.18 mm CMOS process,” IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems, Suzhou, China, pp. 128-131, 2013. (EI) |
| 39 | M.Z. Yang, C.L. Dai, “Fabrication of an ammonia microsensor based on zinc oxide,” IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems, Suzhou, China, pp. 270-273, 2013. (EI) |
| 40 | W.C. Liao, C.L. Dai, “Integrated micro gas sensing array,” 2013 Symposium on Nano Device Technology, Hsinchu, Taiwan, May 2013. |
| 41 | C.C. Yeh, C.L. Dai, “Waste heat recovery using micro thermoelectronic generator,” 2013 Symposium on Nano Device Technology, Hsinchu, Taiwan, May 2013. |
| 42 | C.H. Hsieh, C.L. Dai, “Design and simulation of magnetic sensor,” 2013 Symposium on Nano Device Technology, Hsinchu, Taiwan, May 2013. |
| 43 | C.H. Hsieh, J.Z. Zeng, C.L. Dai, “Design and fabrication of Lorentz force magnetic sensors,” The 17 th Nanotechnology and Microsystem Technology Conference, Taichung, Taiwan, August 22-23, 2013. |
| 44 | W.C. Liao, W.L. Lee, C.L. Dai, “Design and manufacture of micro gas sensing array using the CMOS-MEMS process,” The 17 th Nanotechnology and Microsystem Technology Conference, Taichung, Taiwan, August 22-23, 2013. |
| 45 | C.C. Yeh, W.L. Lee, C.L. Dai, “Fabrication and characterization of thermoelectric micro generators with carbon nanotube,” The 17 th Nanotechnology and Microsystem Technology Conference, Taichung, Taiwan, August 22-23, 2013. |
| 46 | 馮建富, 戴慶良, “檢測揮發性有機化合物之微型氣體感測器陣列,” 第三十屆中國機械工程會議,” 宜蘭, December 6-7, 2013. |
| 47 | 李汪麟, 戴慶良, “利用電鍍法設計和製作熱電發電器,” 第三十屆中國機械工程會議,” 宜蘭, December 6-7, 2013. |
| 48 | 曾健治, 戴慶良, “磁電晶體式之微磁場感測器,” 第三十屆中國機械工程會議,” 宜蘭, December 6-7, 2013. |
| 49 | C.Y. Lin, C.L. Dai, “Integrated of spiral inductor to the microwave switch,” 2012 Symposium on Nano Device Technology, Hsinchu, 2012. |
| 50 | S.W. Peng, C.L. Dai, M.Z. Yang, “CMOS-MEMS micro thermoelectronic generator,” 2012 Symposium on Nano Device Technology, Hsinchu, 2012. |
| 51 | 謝瑱軒, 戴慶良, “應用勞倫茲力的磁場感測器,” 第二十九屆中國機械工程會議, 高雄, 2012. |
| 52 | 葉峻嘉, 戴慶良, “陣列式微型熱電發電器, 第二十九屆中國機械工程會議,” 高雄, 2012. |
| 53 | 廖維溱, 戴慶良, “整合型微氣體感測器陣列, 第二十九屆中國機械工程會議,” 高雄, 2012. |
| 54 | 戴慶良, 楊閔智, 胡育智, 林冠明, “整合積體感測電路的微氣體感測器,” 第二十屆全國自動化科技研討會, 桃園, 2012。 |
| 55 | 戴慶良, 楊閔智, 彭世瑋, 林承陽, “CMOS-MEMS熱電式微發電器,” 第二十屆全國自動化科技研討會, 桃園, 2012。 |
| 56 | 劉佳欣, 戴慶良, “薄型TFT-LCD面板切割製程之研究,” 第二十屆全國自動化科技研討會, 桃園, 2012. |
| 57 | 謝瑱軒, 戴慶良, “應用勞倫茲力的磁場感測器,” 第二十屆全國自動化科技研討會, 桃園, 2012. |
| 58 | 葉峻嘉, 戴慶良, “陣列式微型熱電發電器,” 第二十屆全國自動化科技研討會, 桃園, 2012. |
| 59 | 廖維溱, 戴慶良, “整合型微氣體感測器陣列,”第二十屆全國自動化科技研討會, 桃園, 2012. |
| 60 | M.Z. Yang, C.L. Dai, W.J. Tsai, “Thermoelectric micro generators manufactured using CMOS-MEMS technique,” 2011 Int. Conference on Micro and Nano Engineering, Berlin, Germany, 2011. (EI) |
| 61 | M.Z. Yang, C.L. Dai, C.B. Hung, “Fabrication of a glucose sensor with oscillator circuit using CMOS-MEMS technique,” 2011 Int. Conference on Micro and Nano Engineering, Berlin, Germany, 2011. (EI) |
| 62 | M.Z. Yang, C.L. Dai, W.Y. Lin, Resistive humidity microsensor with circuit manufactured by the CMOS process, 2011 Int. Conference on Micro and Nano Engineering, Berlin, Germany, 2011. (EI) |
| 63 | M.Z. Yang, C.L. Dai, D.H. Lu, “Fabrication of Capacitive Humidity Microsensor Based on CMOS-MEMS Technique,” 2011 Automation, Taiwan, 2011. |
| 64 | W.Y. Lin, C.L. Dai, “Composite Film Micro Humidity Sensor Integrated with Circuit,” 2011 Symposium on Nano Device Technology, Hsinchu, 2011. |
| 65 | W.J. Tsai, C. L. Dai, “Micro Thermoelectric Energy Harvester Based on CMOS-MEMS Technique,” Symposium on Nano Device Technology, Hsinchu, 2011. |
| 66 | C.L. Dai, “Micro gas sensors fabricated using CMOS-MEMS technique,” Symposium on Nano Device Technology, Invitated speaker, Hsinchu, 2011. |
| 67 | G.M. Lin, C.L. Dai, “Ammonia gas sensors integrated with readout circuit,” 2011CSME, Taichung, 2011. |
| 68 | S.W. Peng, C.L. Dai,“CMOS-MEMS micro-thermoelectric generator,” 2011CSME, Taichung, 2011. |
| 69 | Y.C. Hu, C.L. Dai,“Micro Carbon Monoxide Gas Sensor Integrated with Circuit,” 2011CSME, Taichung, 2011. |
| 70 | C.Y. Lin, C.L. Dai, “Integrated of spiral inductor to the microwave switch,” 2011CSME, Taichung, 2011. |
| 71 | 林冠明,戴慶良, “整合型氨氣微氣體感測器,”第十五屆奈米工程暨微系統技術研討會,台北, 2011. |
| 72 | 彭世瑋,戴慶良,“低損耗微型熱電式發電器,”第十五屆奈米工程暨微系統技術研討會,台北, 2011. |
| 73 | 胡育智,戴慶良,“一氧化碳微氣體感測器,”第十五屆奈米工程暨微系統技術研討會, 台北, 2011. |
| 74 | 林承陽,戴慶良,“低驅動電壓及高隔離度之微波開關設計,”第十五屆奈米工程暨微系統技術研討會,台北, 2011. |
| 75 | C.L. Dai, D.H. Lu, “Fabrication of a micro humidity sensor with polypyrrole using the CMOS process,” IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems, Xiamen, China, pp. 115-118, 2010. (EI) |
| 76 | C.L. Dai, Y.C. Chen, M.Z. Yang, P.J. Shih, “Cobalt oxide nanosheet humidity sensor integrated with circuits on chip,” 2010 International Conference on Micro and Nano Engineering, Genoa, Italy, 2010. (EI) |
| 77 | C.L. Dai, PJ Shih, ZY Tsai, MZ Yang, “Capacitive RF switches manufactured by the CMOS-MEMS technique,” 2010 International Conference on Micro and Nano Engineering, Genoa, Italy, 2010. (EI) |
| 78 | M.Z. Yang, C.L. Dai, Z.Y. Tsai, C.B. Hung, “Carbon monoxide micro sensors integrated with readout circuit,” Automation 2010, Chungli, Taiwan, A06-0006, 2010. |
| 79 | C.B. Hung, C.L. Dai, Z.Y. Tsai, M.Z. Yang, “Integrated lipopolysaccharide biosensors with readout circuitry,” Automation 2010, Chungli, Taiwan, 2010. |
| 80 | Z.Y. Tsai, C.L. Dai, C.B. Hung, M.Z. Yang, “Fabrication and characterization of RF CMOS-MEMS switches,” Automation 2010, Chungli, Taiwan, 2010. |
| 81 | M.Z. Yang, P.H. Kao, C.L. Dai, “Design of CMOS-MEMS micro CO sensors,” Symposium on Nano Device Technology, pp. 72-75, Hsinchu, Taiwan, 2010. |
| 82 | Z.Y. Tsai, P.H. Kao, C.L. Dai, “RF MEMS switch with low insertion loss and high isolation,” Symposium on Nano Device Technology, pp. 76-79, Hsinchu, Taiwan, 2010. |
| 83 | C.B. Hung, P.H. Kao, Ching-Liang Dai, “Lipopolysaccharide biosensors,” Symposium on Nano Device Technology, pp. 68-71, Hsinchu, Taiwan, 2010. |
| 84 | 楊閔智, 戴慶良, “水熱合成法製備氧化鋅之整合型氨氣微感測器,” 第十四屆奈米工程暨微系統技術研討會, 高雄, pp. 119-122, 2010. |
| 85 | 林威邑, 戴慶良, “聚苯胺摻雜多壁奈米碳管整合電路之葡萄糖感測器,” 第十四屆奈米工程暨微系統技術研討會, 高雄, pp. 66-69, 2010. |
| 86 | 蔡文榮, 戴慶良, “CMOS-MEMS高效率微熱電發電機之設計與製作,” 第十四屆奈米工程暨微系統技術研討會, 高雄, pp. 187-190, 2010. |
| 87 | 林威邑, 戴慶良, “整合式二氧化碳微氣體感測器,”第三十四屆全國力學會議, 雲林, G2014, 2010. |
| 88 | 陳沂宏, 林威邑, 戴慶良, “矽奈米線酸鹼值反應特性探討,” 第三十四屆全國力學會議, 雲林, H1007, 2010. |
| 89 | 馬為頎, 戴慶良, “三階微機械式帶通共振器,” 第三十四屆全國力學會議, 雲林, G2013, 2010. |
| 90 | 林胤宏, 戴慶良, “觸覺微壓力感測器,” 第三十四屆全國力學會議, 雲林, G2015, 2010. |
| 91 | 蔡文榮, 戴慶良, “以熱電為基礎的微能源收集器,” 第三十四屆全國力學會議, 雲林, I2007, 2010. |
| 92 | P.H. Kao, C.L. Dai, C.-C. Hsu, C.N. Mo, C.P. Lee, M.W. Huang, “Micro-Mirror Array Fabricated by the CMOS Process for Applications of MEMS Display,” SID´s Display Week 2009, Texas, USA, pp. 1759-1762, 2009. |
| 93 | P.H. Kao, C.L. Dai, C.C. Hsu, C.N. Mo, C.P. Lee, M.W. Huang, “Two-Axes Rotatable Micromirror Array for Applications of MEMS Display,” International Display Manufacturing Conference/3DSA/Asia Display, Taipei, Taiwan, Wed-P6-02, 2009. |
| 94 | P.H. Kao, C.L. Dai, “Fabrication and characterization of CMOS-MEMS micro thermoelectrical generators,” International Conference on Mechatronic System of Integration and Application, Tainan, Taiwan, Em-07, 2009. |
| 95 | Y.M. Chang, C.L. Dai, T.C. Cheng, C.W. Hsu, J.Y. Yao, “Fabrication of nanoislands SiGe antireflective thin films by ultrahigh vacuum chemical vapor deposition with in-situ annealing,” Symposium on Nano Device Technology, pp. 56-60, Hsinchu, Taiwan, 2009. |
| 96 | B.W. Lu, C.L. Dai, “Design and fabrication of FET micro-pressure sensor integrated with wireless transmitter,” Symposium on Nano Device Technology, Hsinchu, Taiwan, NB01, 2009 |
| 97 | C.L. Dai, Y.C. Chen, “Nano-sheets CoOOH micro carbon monoxide sensor integrated with readout circuit,” Symposium on Nano Device Technology, Hsinchu, Taiwan, NB01, 2009. |
| 98 | B.S. Liu, P.H. Kao, C.L. Dai, “Simulation and fabrication of a high-order micromechanical band-pass filter,” Symposium on Nano Device Technology, Hsinchu, Taiwan, NB04, 2009. |
| 99 | P.H. Kao, C.L. Dai, “A electrostatic driving rotatable micromirror array,” 13th Conference of Nano and Microsystem Technology, Hsinchu, Taiwan, 08-1053, 2009. |
| 100 | B.W. Lu, C.L. Dai, “An integrated FET micro pressure sensor fabricated by the post-CMOS process,” 13th Conference of Nano and Microsystem Technology, Hsinchu, Taiwan, 07-1052, 2009. |
| 101 | Y.C. Chen, C.L. Dai, “Nano-sheets CoOOH micro CO monoxide sensor integrated with wireless transmitter,” 13th Conference of Nano and Microsystem Technology, Hsinchu, Taiwan, 09-1125, 2009. |
| 102 | B.S. Liu, P.H. Kao, C.L. Dai, “Design and manufacture of a high-order micromachined band-pass filter,” 13th Conference of Nano and Microsystem Technology, Hsinchu, Taiwan, 01-1122, 2009. |
| 103 | 楊閔智, 高斌栩, 戴慶良, “CMOS-MEMS一氧化碳微感測器之設計與分析”, 第33屆全國力學會議，苗栗, H2-367, 2009. |
| 104 | 蔡宗佑, 高斌栩, 戴慶良, “高隔離度的微機電射頻開關設計與製作”, 第33屆全國力學會議, 苗栗, H2-355, 2009. |
| 105 | 洪晟倍, 高斌栩, 戴慶良, “脂多醣體生物感測器”, 第33屆全國力學會議, 苗栗, H2-363, 2009. |
| 106 | 楊閔智, 高斌栩, 戴慶良, “整合輸出電路微一氧化碳氣體感測器之設計與分析”, 第26屆全國機械學術研討會, 台南, E01-012, 2009. |
| 107 | 蔡宗佑, 高斌栩, 戴慶良, “微機電射頻開關低插入損耗及高隔離度之設計”, 第26屆全國機械學術研討會, 台南, E01-005, 2009. |
| 108 | 洪晟倍, 高斌栩, 戴慶良, “含感測電路的整合型脂多醣體生物感測器”, 第26屆全國機械學術研討會, 台南, E01-004, 2009. |
| 109 | C. L. Dai, J.Y. Hong, M.C. Liu, “High Q-factor CMOS-MEMS inductor’, DTIP of MEMS and MOEMS, Nice, France, April, 2008. |
| 110 | M.C. Liu, C.L. Dai and C.H. Chan, “Fabrication and characterization of an ammonia sensor with nanostructure polyaniline,” Asia-Pacific Conference on Transducers and Micro-Nano Technology, Tainan, Taiwan, 2008. |
| 111 | Y.M. Chang, C.L. Dai, T.C. Cheng, C.W. Hsu, J.Y. Yao, “The influence of mechanical properties in SiGe epitaxial thin film,” Asia-Pacific Conference on Transducers and Micro-Nano Technology, Tainan, Taiwan, 2008. |
| 112 | P. H. Kao, C. L. Dai, “Fabrication and characterization of a tunable in-plane resonator with low driving voltage,” Asia-Pacific Conference on Transducers and Micro-Nano Technology, Tainan, Taiwan, 2008. |
| 113 | Y.M. Chang, C.L. Dai, T.C. Cheng, C.W. Hsu, J.Y. Yao, “Influence of strain-relaxed SiGe epilayers with an in-situ thermal annealing”, Symposium on Nano Device Technology, Hsinchu, Taiwan, 2008. |
| 114 | 戴慶良, 吳昌哲, “脈衝式熱傳對壓焊刀頭斷面溫差之探討,” 第25屆中國機械工程研討會, 員林, Nov., 2008. |
| 115 | 戴慶良, 李國弘, “應用電腦視覺於CMOS-MEMS微結構後製程檢測,” 第25屆中國機械工程研討會, 員林, Nov., 2008. |
| 116 | 戴慶良, 高斌栩, “利用書狀結構陣列設計調頻為共振器,” 2008機密機械與製造科技研討會，墾丁, 屏東, 2008. |
| 117 | C. L. Dai, M.C. Liu, “A wet etching post-process for CMOS-MEMS RF switches,” IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems, Thailand, pp. 968-971, 2007. (EI) |
| 118 | C. L. Dai, M.C. Liu, “Nanoparticle SnO2 gas sensor with circuit and micro heater on chip fabricated using CMOS-MEMS technique,” IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems, Thailand, pp. 959-963, 2007. (EI) |
| 119 | Y.M. Chang, C.L. Dai, T.C. Cheng, C.W. Hsu, “Mechanical proprerties of Si0.8Ge0.2 epitaxial thin film,” Int. Conf. Advan. Manufact., Tainan, Taiwan, Nov. 2007. |
| 120 | 戴慶良, 高斌栩, “CMOS MEMS微機械可調式共振器,”第十屆全國機構與機器設計研討會, pp. 645-650, 台中, Nov. 30, 2007. |
| 121 | 戴慶良, 林祐鋒, “CMOS射頻傳輸器之設計,” 第24屆中國機械工程研討會, pp. 4992-4996, 中壢, Nov. 23-24, 2007. |
| 122 | 戴慶良, 高斌栩, “以CMOS-MEMS製程技術設計調頻微共振器,” 第31屆中國力學學研討會, Dec., 2007. |
| 123 | 戴慶良, 詹熾樺, “利用導電高分子-聚苯胺薄膜製作氨氣感測器,” 第24屆中國機械工程研討會, pp. 4970-4974, 中壢, Nov. 23-24, 2007. |
| 124 | 戴慶良, 盧德豪, “製作含積體電路之微酒精氣體感測器,” 第24屆中國機械工程研討會, pp. 4965-4969, 中壢, Nov. 23-24, 2007. |
| 125 | 戴慶良, 林士傑, “應用於射頻之CMOS微可變電容,” 第11屆奈米工程暨微系統技術研討會, August. 30-31 (2007). |
| 126 | 戴慶良, 陳盈良, “微機械式射頻開關,” 第11屆奈米工程暨微系統技術研討會, August. 30-31 (2007). |
| 127 | 戴慶良, 洪俊榆, “CMOS MEMS 可調變之帶通濾波器,” 第11屆奈米工程暨微系統技術研討會, August 30-31 (2007). |
| 128 | 戴慶良, 戴銚葦, “整合積體電路的FET微壓力感測器,” 第11屆奈米工程暨微系統技術研討會, August 30-31 (2007). |
| 129 | 戴慶良,黃鍾嵐, “含感測電路的FET微濕度感測器,” 第11屆奈米工程暨微系統技術研討會, August 30-31 (2007). |
| 130 | 戴慶良, 陳盈良, “低插入損耗及高隔離度微機電射頻開關,” 2007現代電機科技研討會, 雲林, pp. 127-131, June 8 (2007). |
| 131 | 戴慶良, 洪俊榆, “CMOS MEMS可調變之帶通濾波器,” 2007現代電機科技研討會, 雲林, pp. 61-64, June 8 (2007). |
| 132 | 戴慶良, 黃鍾嵐, “含感測電路的FET微濕度感測器,” 2007現代電機科技研討會, 雲林, pp. 424-428, June 8 (2007). |
| 133 | H. M. Hsu, C. L. Dai, M. M. Hsieh, M. C. Tsai, H. J. Peng, “ Implementation and analysis of microwave switch in CMOS-MEMS technology”, IEEE International Circuit and System Conference, May (2006). (EI) |
| 134 | H. H. Wang, C. W. Hsu, W. H. Liao, L. J. Yang, C. L. Dai, “ Micro pressure sensors of 50 mm size fabricated by a standard CMOS foundry and a novel post process”, IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, pp. 578-581, 22-26 Jan. (2006). (EI) |
| 135 | C.L. Dai, W.P. Shih, M.D. Wu, Y.M. Chang, M.J. Huang, “Residual stress in thin films measured by micromachined cantilever deflection and optical interferometer,” 10th Nano Engineering and Microsystem Technology Conference, Hsinchu, Taiwan, December (2006). |
| 136 | J. H. Chen, M. C. Liu, C. L. Dai, “A CMOS RF micromechanical switch”, 2006 Symposium on Nano Devices Technology, Hsinchu, Taiwan, April (2006). |
| 137 | 戴慶良, 戴銚葦, “FET微壓力感測器,” 第23屆中國機械工程研討會,台南, Nov. (2006) |
| 138 | 戴慶良, 林士傑, “應用於射頻之大調變範圍的微可變電容,” 第23屆中國機械工程研討會,Nov. (2006) |
| 139 | 戴慶良, 陳富松, “大調變範圍的微機械可調式共振器”, 第十四屆全國自動化科技研討會, 彰化, Jun. (2006). |
| 140 | 戴慶良, 陳俊翰, “低驅動電壓之微機電射頻開關”, 第十四屆全國自動化科技研討會, 彰化, Jun. (2006). |
| 141 | 楊志偉, 戴慶良, “含電路的整合型壓力感測器”, 第十四屆全國自動化科技研討會, 彰化, Jun. (2006). |
| 142 | C. L. Dai, M. Liu, Y. Li, “A linearly tunable capacitor fabricated by the post-CMOS process,” Proceedings of SPIE, Vol. 5836, Sevilla, Spain (2005). (EI) |
| 143 | 劉茂誠, 戴慶良, “以溶膠凝膠法氣體反應薄膜同時整合微機電結構與讀出電路”, 第九屆奈米工程暨微系統技術研討會, 台南, Dec. (2005). |
| 144 | 喻韋強, 林忠逸, 戴慶良, “CMOS可調頻率為機械式共振器的設計與製作,” 2005年第三屆微電子技術發展與應用研討會, 高雄, May (2005). |
| 145 | 翁祥益, 戴慶良, “整合溼度和溫度及電路之微感測器之製作,” 2005年機密機械製造技術研討會, 屏東, May (2005) |
| 146 | Y. C. Cheng, C. Y. Lee, W. J. Chen, C. L. Dai, P. Z. Chang, P. H. Chen, “Fabrication of the free space optical switch array using the CMOS process,” The 1 st International Symposium on Micro & Nano Technology, pp. I-2-01, Hawaii, USA (2004). |
| 147 | Y. C. Cheng, C. L. Dai, C. Y. Lee, P. Z. Chang, P. H. Chen, “Fabrication of MEMS mirror switches by the standard CMOS process,” Proc. Asia-Pacific Conf. Of Transducers and Micro-Nano Technology, PP. 945-950, Sapporo, Japan (2004). |
| 148 | Y. C. Cheng, C. Y. Lee, C. L. Dai, W. J. Chen, P. Z. Chang, P. H. Chen, “Fabrication of micro-optical switch by post-CMOS micromachining process,” SPIE International Symposium Photonic Europe－MEMS, MOEMS, and Micromachining, pp. 274-283, Strasbourg, France (2004). (EI) |
| 149 | 彭宣榕, 許恒銘, 戴慶良, “相容於CMOS製程的微機電射頻開關之研製,” 第八屆奈米工程暨微系統技術研討會, 新竹, Dec. 2-3, (2004) |
| 150 | 李裕仁, 劉茂誠, 戴慶良, “CMOS可變電容之設計與製作,” 第八屆奈米工程暨微系統技術研討會, 新竹, Dec. 2-3, (2004) |
| 151 | 張原銘, 黃敏睿, 戴慶良, “薄膜楊氏係數及殘留應力之量測,” 第21屆中國機械工程研討會, pp.3125-3130, 高雄, Nov. (2004) |
| 152 | 劉維虔, 張原銘, 戴慶良, “利用共振方法量測氮化矽和二氧化矽薄膜之楊氏係數和柏松比,” 第28屆中華民國力學會議, pp. 375-378, 台北, Dec. (2004) |
| 153 | 戴慶良, 劉茂誠, “利用多晶矽串接結構與Seebeck effect製作感測器,”2004第十三屆全國自動化科技研討會, 台北, (2004) |
| 154 | 戴慶良, 劉維虔, “利用共振方法量測薄膜機械性質,”2004第十三屆全國自動化科技研討會, 台北, (2004) |
| 155 | 黃敏睿, 張原銘, 戴慶良, “氮化矽和二氧化矽薄膜機械性質之量測,”第二十七屆中國力學研討會, 高雄, (2003) |
| 156 | J. H. Chiou, C. L. Dai, J. Y. Chen, K. H. Yen, “ A novel fasting post-CMOS bulk micromachaniing technology with addition maskless etching,” ASME International Mechanical Engineering Congress & Exposition, Washington, v 5, p 97-100, USA, November 16-21, (2003) (EI) |
| 157 | J. H. Chiou, R. J. Lin, C. L. Dai, K. H. Yen, Y. C Shih, “ An actuator of controlling the area of dielectric layer by commercial CMOS fabrication,” ASME International Mechanical Engineering Congress & Exposition, Washington, v 5, p 623-627, USA, November 16-21, (2003) (EI) |
| 158 | C. Y. Lee, T. T. Wu, Y. Y. Chen, S. Y. Pao, W. J. Chen, C. L. Dai et. al, “In-situ monitoring of thickness of quartz membrane during batch chemical etching using a novel micromachined acoustic wave sensor,” Proceedings of the Annual IEEE International Frequency Control Symposium, p 993-1000, (2003). (EI) |
| 159 | C. L. Dai,C. H. Tsai,Y. R. Lee, Y. C. Cheng, “Improvement of substrate loss for micro inductors using the CMOS process and post-process,” 第七屆奈米工程暨微系統技術研討會, 台北, (2003) |
| 160 | C. L. Dai, Y. R. Lee, C. H. Tsai,Y. C. Cheng, “A variable capacitor with a lateral displacement microactuator,” 第七屆奈米工程暨微系統技術研討會, 台北, (2003) |
| 161 | Y. C. Cheng, C. Y. Lee W. J. Chen, C. L. Dai, P. Z. Chang, P. H. Chen, “ Design and fabrication of a free-space micro-optical bench based on CMOS-MEMS process,” 第二十屆機械工程研討會, pp. 73-79, 台北, (2003) |
| 162 | Y. C. Cheng, C. Y. Lee W. J. Chen, C. L. Dai, P. Z. Chang, P. H. Chen, “ 微型光通訊元件之設計與製作,” 第七屆奈米工程暨微系統技術研討會, pp. 171-174, 台北, (2003) |
| 163 | 戴慶良, “CMOS微電感的設計和製作,” 2002奈米工程暨微系統技術研討會, 台南, (2002) |
| 164 | S. C. Chang, C. L. Dai, J. H. Chiou, P. Z. Chang, “Capacitive Micro Pressure Sensors with Underneath Readout Circuit Using a Standard CMOS Process,” Proceeding of SPIE, Vol. 4334, pp. 336-344, California, USA (2001).(EI) |
| 165 | 戴慶良, 邱景宏, 顏凱翔, 陳立夫, “以靜電式微結構量測CMOS薄膜的楊氏係數”, 中華民國第二十五屆全國力學會議, 台中, pp. 925-932 (2001). |
| 166 | 黃健生, 趙昌博, 陳立夫, 邱景宏, 戴慶良, “ CMOS微馬達的設計與製作”, 第十八屆中國機械工程學會全國學術研討會, 台北, pp. 115-120 (2001). |
| 167 | H. Chen, K. Yen, H. Huang, J. Chio, C. L. Dai, C. Chang, P. Chang, “ Fabrication of a Micromachined Optical Modulator Using the CMOS Process”, Proceeding of SPIE, Vol. 4078, pp. 620-626 (2000) |
| 168 | H. Chen, K. Yen, J. Chio, H. Huang, C. L. Dai, C. Chang, P. Chang, “Integrated Eyeball-tracking Device”, Proceeding of SPIE, Vol. 4078, pp. 637-645 (2000). |
| 169 | H. Chen, H. Huang, K. Yen, J. Chio, C. L. Dai, C. Chang, P. Chang, “ Fabrication of a Diffractive Optical Elements Using the CMOS Process”, Proceeding of SPIE, Vol. 4078, pp. 620-626 (2000) |
| 170 | 戴慶良, 呂秀雄, 張培仁, “ CMOS微感測器和微致動器”,第一屆海峽兩岸製造技術研討會, 台北, pp. 61-69 (2000). |
| 171 | 戴慶良, 陳炎洲, 吳明誠, “消除高轉速CD/DVD光碟機振動之研究”, 國科會八十九年度機械固力及熱流與能源學門成果研討會, 高雄(2000). |
| 172 | C. L. Dai, P. Z. Chang and C. Y. Chung, “ A CMOS capacitive pressure sensor - Design and fabrication,” International Fair and Congress For Sensors, Transducers & Systems, Germany, (1997). |
| 173 | C. L. Dai, P. Z. Chang, S. S. Lu, “ A pure CMOS surface micromachined pressure sensor,” International Conference on Precision Engineering, Taiwan, pp. 987-991(1997). |
| 174 | P. Z. Chang, C. L. Dai, S. S. Lu, “ Microstructures for measuring residual strains of CMOS thin films,” International Conference on Precision Engineering, Taiwan, pp. 981-986 (1997). |
| 175 | 戴慶良, 張培仁, 黃暉雯, “ 以表面蝕刻及封口後製程製作電容式CMOS壓力計,” 第一屆微系統技術研討會, 新竹, (1997). |
| 176 | 戴慶良, 張培仁, 張建六, “ 以微機電結構測試CMOS積體電路內各層薄膜殘留應變之研究,” 第一屆微系統技術研討會, 新竹, (1997). |
| 177 | C. L. Dai, P. Z. Chang, S. S. Lu, D. J. Wei and S. I. Liu, “ An integrated capacitive accelerometer using standard CMOS process,” International Electron Devices and Materials Symposia, Symposium C、E＆F, Taiwan, pp. 315-318 (1996). |
| 178 | C. C. Lai, L. J. Yang, P. Z. Chang, C. L. Dai, D. J. Wei and S. I. Liu, “ A piezoresistive pressure sensor fabricated by a commercial DPDM CMOS process,” International Electron Devices and Materials Symposia, Symposium C、E＆F, Taiwan, pp. 307-310, (1996). |
| 179 | 戴慶良, 張培仁, “ 力學系統微型化 - 以積體電路技術製作微感測器之研究,” 中華民國第二十屆全國力學會議, 台北, pp. 544-551 (1996). |
